M08100 - SEMI M81 - Guide to Defects Found in Monocrystalline Silicon Carbide Substrates StdTpc-Fluorocarbon Components SEMI E136-1104 (first published)

SEMI E136-1104 (first published)

SEMI MF1188-1105 (technical revision)

• A description of information and control functions needed in a semiconductor manufacturing environment

데이터 수집 계획의 결과로 생성된 데이터의 포맷 또한 데이터 수집 계획 출력 값을 이용할 때 지원되는 인터페이스 형태로 정의된다

M08100 - SEMI M81 - Guide to Defects Found in Monocrystalline Silicon Carbide Substrates StdTpc-Fluorocarbon Components SEMI E136-1104 (first published)This Standard was technically approved by the Compound Semiconductor Materials Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in April 2018; originally published June 2011. The purpose of this Guide is to list, illustrate and provide reference for various characteristic features and defects that are seen on