HB00400 - SEMI HB4 - Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI) Revision:SEMI HB4-0913 (Reapproved 0419) - Superseded SEMI M85 — Guide for

SEMI M85 — Guide for the Measurement of Trace Metal Contamination on Silicon Wafers Surface by Inductively Coupled Plasma Mass Spectrometry

and phosphorus

1-1104 (first published)

FPDに適用される。本スタンダードは，主にSemuの測定方法およびSemuの改訂された定義を取り扱う。対象とする画面サイズは，通常，対角線長で20

HB00400 - SEMI HB4 - Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI) Revision:SEMI HB4-0913 (Reapproved 0419) - Superseded SEMI M85 — Guide forThe purpose of this Standard is to define the equipment automation interface for communication and control of process, automation and metrology equipment used in high brightness light emitting diode (HB LED) manufacturing. It intends to produce economic benefits for both manufacturers and equipment suppliers by identifying a subset of relevant functionalities out of the existing SEMI Communications Standards for the application in HB LED manufacturing