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1-0623 (Reapproved 0324)
SEMI MF1451-0707 (Reapproved 0421)
This Standard describes a Guide for analysis of virgin high-purity ion exchange (HPIX) resin suitable for use in ultrapure water (UPW) polish applications
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MS00400 - SEMI MS4 - Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance StdPbc-0323 1-0623 (Reapproved 0324)The absence of a generally accepted method to determine Youngs modulus has provided a challenge to the microelectromechanical systems (MEMS) community for many years. Without a standard measurement technique, measurements between different laboratories cannot be meaningfully compared. This Standard provides a test method to determine Youngs modulus for thin, reflecting films, based on the average resonance frequency of a single layered cantilever. It
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