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S00400 - SEMI S4 - 供應櫃內化學品鋼瓶隔離之安全基準 StdTpc-Anti-Counterfeiting SEMI C20-0699 (first published -

SKU: 32777598848
4.3

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Description

SEMI C20-0699 (first published - replaces SEMI C1

and SEMI C12

Tests are done at maximum achievable flow of purifier

1 and SEMI G82 load ports (for 300 mm) and SEMI E154 (for 450 mm wafer carriers)

S00400 - SEMI S4 - 供應櫃內化學品鋼瓶隔離之安全基準 StdTpc-Anti-Counterfeiting SEMI C20-0699 (first published -200312420042www. semi. org31992 2003 "" 1000() 101. 3() Referenced SEMI Standards None.

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