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The purpose of this document is to define a test method to quantify the efficiency of a purifier for removal of an active gaseous impurity from a matrix gas
FPD基板が静的に保持された場合の物理的搬送に関する用語とその定義を定める。
7 mm or 800 × 950 × 1
It has been replaced by SEMI C97
D00300 - SEMI D3 - FPD基板の有効範囲の仕様 StdPbc-0615 The purpose of this documentNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Flat Panel Display Factory Automation Global Technical Committee2009513global Audits and Reviews Subcommittee20097www. semi. org199120037 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to
