C00605 - SEMI C6.5 - Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas StdTpc-Process Chemicals - Solvents 10-0600 (Reapproved 1017)

10-0600 (Reapproved 1017)

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31

due to the migration to large substrate sizes in FPD production

SEMI D19-0305 (Reapproved 0412)

C00605 - SEMI C6.5 - Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas StdTpc-Process Chemicals - Solvents 10-0600 (Reapproved 1017)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in November 2011; originally published in 1990; previously published November 2002. NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI C97. The purposes