E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) Revision:SEMI E30.5-0302 (Reapproved 0308) - Superseded Data Types

Data Types

NOTICE: This Document is no longer published with the SEMI E54 suite of Standards

This Standard applies to components that are installed in between a substrate and a component in a sandwich or stacked manner

and to provide literature references where further details can be found

E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) Revision:SEMI E30.5-0302 (Reapproved 0308) - Superseded Data TypesThis Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications