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D00600 - SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates Revision:SEMI D6-0305 - Superseded 1 This Standard provides a

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Description

1  This Standard provides a series of specifications for different grades of oxygen (O2) that are used in the semiconductor industry

SEMI C33-0699 (first published - replaces SEMI C1

SEMI E16-90 (Reapproved 0699)

and for the handling and shipping of wafers

D00600 - SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates Revision:SEMI D6-0305 - Superseded 1 This Standard provides aThis Specification defines the standard for substrates used to fabricate flat panel display masks. This Specification applies to photomasks that are principally used in fabricating flat panel displays. The edge lengths specified range from 202. 8 mm 202. 8 mm to 1620 mm 1780 mm. Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1). Referenced SEMI Standards (purchase separately) SEMI P1

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