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SEMI M15 — Polished Wafer Defect Limits Table for Polished Gallium Arsenide
このSEMIスタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます｡ SEMIスタンダード日本語翻訳版をご利用にあたっての注釈を本文の末尾に記載しております（「すべきである」「しなければならない」について等）。
This Standard is intended to be referenced by other Standards which define specific objects to reduce redundancy
XML Three Tier Model Architecture
E06700 - SEMI E67 - Test Method for Determining Reliability of Mass Flow Controller StdPbc-0713 SEMI M15 — Polished WaferThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in February 2018; originally published September 1997; previously published October 2011. This Document describes a method to help determine the ability of a mass flow controller (MFC) to meet the manufacturers
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