E18600 - SEMI E186 - Specification for Location and Dimensions for Power Connectors and Ethercat Ports in Mass Flow Controllers and Mass Flow Meters Revision:SEMI E186-1121 - Current 1-0301 (technical revision)

1-0301 (technical revision)

SEMI E90-0707 (technical revision)

Both automatic and manual process panels are within the scope of this test procedure

1 150mm鏡面研磨単結晶シリコンウェーハ（オリフラあり，セカンダリフラットなし，T/3エッジプロファイル）

E18600 - SEMI E186 - Specification for Location and Dimensions for Power Connectors and Ethercat Ports in Mass Flow Controllers and Mass Flow Meters Revision:SEMI E186-1121 - Current 1-0301 (technical revision)This Standard establishes the location and physical dimensions of mass flow controllers (MFCs) and mass flow meters (MFMs) using EtherCAT communication protocol. This Standard describes location and physical dimension of EtherCAT power and communication connectors used in MFCs MFMs. This Standard applies to mass flow controllers and mass flow meters used in both conventional and surface mount gas delivery systems. Referenced SEMI Standards (purchase