F12200 - SEMI F122 - Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling StdTpc-Mass Flow Controllers この仕様は，モールディングコンパウンド中の抽出可能微量異物の定量のための試験方法を定義する。

この仕様は，モールディングコンパウンド中の抽出可能微量異物の定量のための試験方法を定義する。

including activities related to semiconductor or FPD manufacturing

It is designed for environmental professionals in the semiconductor industry

4  These test methods are particularly useful in testing materials to be used in photovoltaic cells and other optical device applications since the diffusion length is derived by methods that are closely related to the functioning of the device

F12200 - SEMI F122 - Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling StdTpc-Mass Flow Controllers この仕様は，モールディングコンパウンド中の抽出可能微量異物の定量のための試験方法を定義する。1 Purpose 1. 1 This Guide suggests formats for the facilities data package (FDP) typically required for the installation of manufacturing equipment in a facility. The data and formats suggested by this Guide complement other SEMI Standards (e. g., SEMI E6), and include the utility requirements and connections information needed for installing manufacturing equipment (including support equipment) and connecting that equipment to the facility and