C03800 - SEMI C38 - Guide for Phosphorus Oxychloride StdDcs-Withdrawn - Historical originally published January 2013

originally published January 2013

orgで入手可能となる。初版は1996年発行。前版は2004年11月発行。

NOTICE: Paragraphs entitled NOTE are not an official part of this Document and are not intended to modify or supersede it

This Standard describes a framework for identifying and classifying technical training tiers

C03800 - SEMI C38 - Guide for Phosphorus Oxychloride StdDcs-Withdrawn - Historical originally published January 2013NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to provide a guide for a grade of phosphorus oxychloride for which a need has been identified. 2 Scope 2. 1 This Standard lists the proposed impurity limits of phosphorus