M00100 - SEMI M1 - 鏡面単結晶シリコンウェーハの仕様 Revision:SEMI M1-1111 - Superseded and services to support the

and services to support the integration of production equipment within a semiconductor factory

SEMI S23 — Guide for Conservation of Energy

which may impact the solar cell efficiency negatively

本テスト方法の主な対象は，次のタイプの半導体処理装置であるが，それらには限定されない。

M00100 - SEMI M1 - 鏡面単結晶シリコンウェーハの仕様 Revision:SEMI M1-1111 - Superseded and services to support theSEMI SEMI SOI TTV 1 322216 nm300450 mm1 Polycrystalline siliconSEMI M16 JEITA EM 3601A, SEMI M62, SEMI M61, SEMI M8, SEMI M24, SEMI M38, SEMI M57, SOISEMI M41SEMI M71JEITA EM 3603B, SEMI PV22 SOI 23SI100 mm 1. 10. 11. 10. 21. 111. 121. 13. 1 1. 13. 2JEITA EM 36021. 15JEITA EM 3602 1. 1 2 1. 2 3 1. 5 100mm525m m 1. 6 100mm625m m 1. 7 125mm 1. 8. 1 150mmT 3 1. 8. 2 150mmT 4 1. 9. 1 200mmT 3 1. 9. 2 200mmT 4 1. 9. 3 200mm 1. 10. 1 200mmT 3 1. 10. 2