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SEMI E142-0225 (technical revision)
SEMI G90-0811 (Reapproved 0318)
5 The metrology examples provided in this Guide originated from industry experts and are believed to be representative of tool performance as of the year 2012
24 Ω·cm to about 330 Ω·cm in p-type wafers)
E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port StdPbc-0620 SEMI E142-0225 (technical revision)1 Purpose 1. 1 The purpose of this Specification is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded. The intention of this Specification is to define a set of requirements and features to enable interoperability of load ports and Tape Frame FOUPs without limiting innovative solutions. 2 Scope 2. 1 The interface specification in this
