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Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation
the actual diameter of nominal 300 mm wafers may millimeters smaller
exceptions
buffer oxide etchants
E08000 - SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) StdPbc-0813 Alternative methods may be usedThe purpose of this Test Method is to provide a standardized method for quantifying the effect of mounting attitude on a mass flow controller (MFC). This Standard provides a common basis for communication between manufacturers and users regarding testing and describing MFC mounting effects. This Standard describes a method to determine the effect of attitude (mounting position) of a MFC on flow span and zero. The intent of this Standard is not to
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