M05900 - SEMI M59 - Terminology for Silicon Technology StdTpc-Electronic Data Interchange SEMI C29 — Specifications and

SEMI C29 — Specifications and Guide for 4

The interface specified in this Standard can be for a sealed mini-environment

When site specifications differ

specified in the Common Device Model (CDM) and appropriate Specific Device Models (SDM’s)

M05900 - SEMI M59 - Terminology for Silicon Technology StdTpc-Electronic Data Interchange SEMI C29 — Specifications andNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Silicon technology underlies the integrated circuit and device industry. To promote common understanding and correct communication between suppliers and customers and others in the field, terms used in this field should be