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C06600 - SEMI C66 - Guide for Trimethylaluminium (TMAI), 99.5% Quality Revision:SEMI C66-0317 - Inactive 1 This Standard establishes practices

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Description

1  This Standard establishes practices for measuring selected characteristics of FPD color filters

1 mmがすべての基板に適応する。

SEMI D22-0999 (first published)

This Standard defines the specification for ultra large size substrate case used in flat panel display (FPD) manufacturing process

C06600 - SEMI C66 - Guide for Trimethylaluminium (TMAI), 99.5% Quality Revision:SEMI C66-0317 - Inactive 1 This Standard establishes practicesThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published February 2008. The purpose of this Document is to provide a guide for trimethylaluminum (TMAl) used in the semiconductor industry. The scope of this Document covers a

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