F03500 - SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement StdPbc-0418 and operation of secondarily contained

and operation of secondarily contained distribution piping for hazardous production material (HPM) gases

注意：　本文書は，2012年，全面的に改訂された。

SEMI MF1982-0714 (complete rewrite)

SEMI G71-0996 (first published)

F03500 - SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement StdPbc-0418 and operation of secondarily containedThis test method was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on December 4, 2003. Initially available at www. semi. org February 2004; to be published March 2004. Originally published September 1998. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to