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S00900 - SEMI S9 - Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment that have Been Moved to SEMI S22 Revision:SEMI S9-0307 (Withdrawn 0211) - Withdrawn SEMI D68-0719 (Reapproved 0925)

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Description

SEMI D68-0719 (Reapproved 0925)

本仕様はフラットパネルディスプレイ用ガラス基板の供給者および,あるいは購入者により利用され,使用されるすべてのガラス基板に有効である。

SEMI M31 — Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers

This Guide is intended for use with other practices and test methods

S00900 - SEMI S9 - Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment that have Been Moved to SEMI S22 Revision:SEMI S9-0307 (Withdrawn 0211) - Withdrawn SEMI D68-0719 (Reapproved 0925)The purpose of this document is to provide a permanent withdrawal notice for SEMI S9 indicating that all technical content has been incorporated within SEMI S22. Referenced SEMI Standards SEMI S1 Safety Guideline for Equipment Safety Labels SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

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