F09400 - SEMI F94 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems Revision:SEMI F94-1012 - Inactive SEMI E176-1017 (first published)

SEMI E176-1017 (first published)

Because these test methods are destructive

This Specification shall be used by vendors and/or buyers of glass substrates for flat panel display and is effective for all glass substrates used

previously published June 2009

F09400 - SEMI F94 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems Revision:SEMI F94-1012 - Inactive SEMI E176-1017 (first published)This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2004; previously published March 2012. This Standard establishes the properties and physical of two port components for 1. 5 inch type surface mount gas distribution