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SEMI M12-92 (technical revision)
functional groups (FGs)
• Signal definition including load port assignment signals (¶ 6
M02000 - SEMI M20 - Practice for Establishing a Wafer Coordinate System Revision:SEMI M20-0215 - Superseded AlternativelyNOTICE: This Document was reapproved with minor editorial changes. Processing systems now employed in advanced device manufacturing use aligning mechanisms to position the wafer rotationally and in x y prior to processing. Many of these scan the wafer periphery and determine the geometric center of the wafer surface. This is most often seen on stepping aligners, to minimize the effects of wafer to wafer diameter variation in mixed aligner type fabs.
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