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such as very fast bipolar switching devices and high power devices
where a 450 FOUP and 450 MAC can be loaded and unloaded
SEMI M17-1110 (Reapproved 1121)
This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19
E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization Revision:SEMI E10-0221 - Superseded such as very fast bipolar1 Purpose 1. 1 This Specification establishes a common basis for communication between users and suppliers of manufacturing equipment in the semiconductor and related industries by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment. 2 Scope 2. 1 This Specification defines six mutually exclusive, basic equipment states for all of
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