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SEMI M1-0997 (technical revision)
SEMI MF84-0307 (technical revision)
SEMI D20 — Terminology for FPD Mask Defect
The test is intended to accelerate the corrosion while simulating conditions that may be found within process equipment and gas systems in the semiconductor industry
MF072800 - SEMI MF728 - Practice for Preparing an Optical Microscope for Dimensional Measurements Revision:SEMI MF728-81 (Reapproved 2003) - Superseded SEMI M1-0997 (technical revision)Dimensional measurements made with an optical microscope are made on the optical image of the specimen and not directly on the specimen itself. The method of illuminating the specimen affects the image content, including the appearance of edges which are used in defining the size of the specimen. This Practice includes adjusting the microscope for Kohler illumination, which provides uniform illumination of the specimen, reduces stray light, and
