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P04100 - SEMI P41 - XMLによる,検査装置,修正装置およびレビュー装置間で取扱うマスク欠陥データ仕様 Revision:SEMI P41-0304E - Inactive When the resin is supplied

SKU: 10042986673
4.4

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Description

When the resin is supplied in non-mixed form (i

Method A is destructive and is limited to inspection of discrete points on the periphery

This Specification covers the characteristics specific to attenuated phase shift masks and mask blanks

and packaging prior to transport

P04100 - SEMI P41 - XMLによる,検査装置,修正装置およびレビュー装置間で取扱うマスク欠陥データ仕様 Revision:SEMI P41-0304E - Inactive When the resin is suppliedNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2009Japanese Regional Standards Committee20042www. semi. org20043 E 2004923 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to

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